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An introduction to surface-micromachining / by Robert W. Johnstone, M. Parameswaran.

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Material type: Text

TextOriginal language: English Publication details: Boston : Kluwer Academic Publishers, 2004Description: x, 186 p. : ill. 25 cmISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books	Library Section SB- R304	671.3/5 ROI 2012 (Browse shelf(Opens below))	Available		P-33793

Includes bibliographical references and index.

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