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An introduction to surface-micromachining /

Johnstone, Robert W.

An introduction to surface-micromachining / by Robert W. Johnstone, M. Parameswaran. - Boston : Kluwer Academic Publishers, 2004 - x, 186 p. : ill. 25 cm.

Includes bibliographical references and index.

ISBN: 1402080204 (alk. paper);1402080212 (ebook)

LCCN: 2004050720

Subjects--Topical Terms:
Micromachining.

Dewey Class. No.: 671.3/5 / ROI 2012

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