| 000 | 01207cam a2200325 a 4500 | ||
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| 001 | 45631 | ||
| 003 | BD-DhNLB | ||
| 005 | 20230810153914.0 | ||
| 008 | 960830s1997 fluaf b 001 0 eng | ||
| 010 | _a 96043344 | ||
| 020 | _a0849394511 (acidfree paper) | ||
| 040 |
_aDLC _cDLC _dDLC |
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| 050 | 0 | 0 |
_aTK7836 _b.M33 1997 |
| 082 | 0 | 0 |
_a621.3815/2 _220 |
| 100 | 1 |
_aMadou, Marc J. _940329 |
|
| 245 | 1 | 0 | _aFundamentals of microfabrication / |
| 260 |
_aBoca Raton, Fla. : _bCRC Press, _cc1997. |
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| 300 |
_a589 p., [22] p. of plates : _bill. (some col.) ; _c29 cm. |
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| 504 | _aIncludes bibliographical references (p. 565-569) and index. | ||
| 650 | 0 |
_aMicroelectronics. _940330 |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. _940331 |
|
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. _940332 |
|
| 650 | 0 |
_aMachining. _940333 |
|
| 650 | 0 |
_aMicroelectronic packaging. _940334 |
|
| 650 | 0 |
_aLasers _xIndustrial applications. _940335 |
|
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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| 942 |
_2ddc _n0 _cBK |
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_c45631 _d45631 |
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