Madou, Marc J. <br/><br/>
Fundamentals of microfabrication / 

 - Boca Raton, Fla. :  CRC Press,  c1997. 
 - 589 p., [22] p. of plates :  ill. (some col.) ;  29 cm. 
<br/><br/>Includes bibliographical references (p. 565-569) and index. 
<br/><br/><label>ISBN: </label>0849394511 (acidfree paper) 
<br/><br/><label>LCCN: </label>96043344  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Integrated circuits--Design and construction.<br/>Microelectromechanical systems--Design and construction.<br/>Machining.<br/>Microelectronic packaging.<br/>Lasers--Industrial applications.
<br/><br/><label>LC Class. No.: </label>TK7836  / .M33 1997 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2