TY  - BOOK
AU  - Johnstone, Robert W.
AU  - Parameswaran, Ash M.
TI  - An introduction to surface-micromachining
SN  - 1402080204 (alk. paper);1402080212 (ebook)
U1  - 671.3/5 22
PY  - 2004///
CY  - Boston
PB  - Kluwer Academic Publishers
KW  - Micromachining
N1  - Includes bibliographical references and index
ER  -