Johnstone, Robert W. An introduction to surface-micromachining / by Robert W. Johnstone, M. Parameswaran. - Boston : Kluwer Academic Publishers, 2004 - x, 186 p. : ill. 25 cm. Includes bibliographical references and index. ISBN: 1402080204 (alk. paper);1402080212 (ebook) LCCN: 2004050720 Subjects--Topical Terms: Micromachining. Dewey Class. No.: 671.3/5 / ROI 2012