Angular sensitivity of controlled implanted doping profiles / Robert G. Wilson ... [et al.].
Material type: TextOriginal language: English Publication details: [Washington] : U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off., 1978Description: vii, 54 p. : ill. 26 cmSubject(s): DDC classification:- 602/.1 s;621.3815/2/028 23
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